Growth, characterization and interfacial reaction of magnetron sputtered Pt/CeO2 thin films on Si and Si3 N4 substrates
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولStructure and morphology of magnetron sputtered CoCr thin films
The growth characteristics of magnetron sputtered Co-22%Cr thin films on amorphous glass or carbon substrates have been investigated utilizing transmission electron microscopy, X-ray diffraction and electrical resistivity measurements. Results indicate that the initial deposit is “amorphous”. but that small crystallites form before the film reaches 5 nm film thickness. By 10 nm, well oriented g...
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Indium tin oxide (ITO) films have been deposited onto glass substrates by ifmagnetron sputtering without insitu substrate heating. The as-deposited films have an electrical resistivity of 5x1O a-cm, visible transmittance of about 85%, and infrared (IR) reflectance of above 80% at 5 jim. The effect of sputtering parameters on the deposition rate and the electrical and optical properties of ITO f...
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In this work, we present our magnetron sputtering based methodology to produce amorphous silicon coatings with closed porosity, as a strategy to fabricate solid helium targets, in the form of supported or self-supported thin films, for nuclear reactions. We show how by changing the He working pressure it is possible to obtain highly porous homogeneous structures incorporating different He amoun...
متن کاملAnnealing studies of magnetron-sputtered CoCr thin films
The microstructure and magnetic properties of annealed CoCr thin films of various thicknesses, deposited on glass substrates, were examined. In general, little grain growth upon annealing was observed. Low-angle grain boundaries, present in as-sputtered films of thickness ~50nm, were absent in annealed films. This occurs simultaneously with a decrease in the measured electrical resistivity. A r...
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ژورنال
عنوان ژورنال: Surface and Interface Analysis
سال: 2015
ISSN: 0142-2421
DOI: 10.1002/sia.5774